At a glance
Vacuum generators are devices designed to evacuate the gas lines of residue gas by creating a vacuum. With a minimum source Nitrogen pressure of 70 psig, FITOK vacuum generators can generate a 60 Torr vacuum, thus greatly improving the purging efficiency.
– All-welded design
– Inner surface roughness of Ra 20 μin. (.51 μm)
– 100% tested for Helium leakage
|Ultimate Vacuum Pressure||60 Torr (-93.3 kPa)|
|Gas Pressure at Ultimate||70 psig (4.8 bar)|
|Gas Flow at Ultimate||67 l/min|
|Max. Working Pressure||132 psig (10 bar)|
|Working Temperature||32~302°F (0~150°C)|
How it works
Supply the vacuum generator with gas at inlet. The constriction of nozzle causes the gas flows to accelerate. After exiting the nozzle, the accelerated gas expands and flows through the diffuser into the outlet port. In the process, a vacuum is created in the diffusion chamber, which sucks the residue gas from the gas lines through the vacuum port.
Should you have any questions, please contact us directly!