fitok Vacuum-Generators

At a glance

Vacuum generators are devices designed to evacuate the gas lines of residue gas by creating a vacuum. With a minimum source Nitrogen pressure of 70 psig, FITOK vacuum generators can generate a 60 Torr vacuum, thus greatly improving the purging efficiency.
– All-welded design
– Inner surface roughness of Ra 20 μin. (.51 μm)
– 100% tested for Helium leakage

Technical Data

  Ultimate Vacuum Pressure   60 Torr (-93.3 kPa)
  Gas Pressure at Ultimate   70 psig (4.8 bar)
  Gas Flow at Ultimate   67 l/min
  Max. Working Pressure   132 psig (10 bar)
  Working Temperature   32~302°F (0~150°C)

How it works

Supply the vacuum generator with gas at inlet. The constriction of nozzle causes the gas flows to accelerate. After exiting the nozzle, the accelerated gas expands and flows through the diffuser into the outlet port. In the process, a vacuum is created in the diffusion chamber, which sucks the residue gas from the gas lines through the vacuum port.

fitok Vacuum Generators

Click to see full-size diagram

Should you have any questions, please contact us directly!