FITOK provides a full range of fittings and components that are designed to be compatible with Semiconductor manufacturing and applications.

FITOK  High Purity & Ultra High Purity

FITOK High Purity & Ultra High Purity Products

FITOK manufacture Face Seal Fittings, Cylinder Connections, Weld fittings, Diaphragm Valves, Regulators, Back Pressure Regulators, Bellows-sealed Valves, Bellows-sealed Metering Valves, Check Valves, Integrated Gas Systems and Point-of-use Panels.

FITOK  Class 100 Cleanroom

Product customization service is also available, on different materials such as 316L VAR and 316L VIM-VAR stainless steel materials which are specifically designed for use in high purity applications. Ultra-High Purity cleaning, welding, assembly, testing and packaging are performed in our Class 100 cleanroom to prevent products from contamination.

Popular Product Introduction

DP Series Low Pressure Pneumatic Diaphragm Valves

FITOK  Ultra High Purity, High Pressure, SVH Series
  • Fully contained to seat to provide excellent resistance to swelling and contamination
  • Elgiloy diaphragm to provide high strength and corrosion resistance
  • Fully functional under vacuum conditions

SM Series Low Pressure Bellows-sealed Valves

FITOK  MU Series, Bellows-sealed
  • Metal-to-metal gasket seal without external leakage
  • Precision-formed metal bellows to ensure reliability
  • Non-rotating stem tip to increase shutoff cycle life

SVH Series High Pressure Bellows-sealed Valves

FITOK  High Purity & Ultra High Purity
  • 316L SS precision-formed bellows for long cycle life
  • PCTFE stem tip material with remarkable chemical and thermal resistance
  • Indicator switch assembled on pneumatic valves

MU Series Bellows-Sealed Metering Valves

FITOK  High Purity & Ultra High Purity
  • Reset spring design with no backlash for precise, repeatable flow settings
  • Micrometer handle measures stem position in 0.0008 in. (0.02 mm) increments
  • Valves open to maximum flow in six turns
  • Modular design to reduce maintenance cost

ALD Series Atomic Layer Deposition Diaphragm Valves

  • Ultrahigh cycle life with high-speed actuation
  • Quick response capable of valve opening or closing time of less than 5ms
  • Thermal actuator extends the life in applications where the body is heated
  • Valves with inductive sensors, solenoid valve assemblies, heater cartridge and thermocouple holes are available

Integrated Gas System 

  • Modular design – shorten design time
  • Surface mounting – easy installation and maintenance
  • miniaturisation
  • 316LVV material, electropolishing process and orbital welding 
  • W-seal

Please contact us for more details!