FITOK Economic Diaphragm Valves

DE Series Economic Diaphragm Valves are typical products for ultra high purity gas fluid systems. Reliability and economy are achieved by reducing the number of components, optimising machining methods and mass production, while maintaining the same basic performance by using the same materials, cleaning and packaging processes as the other series of FITOK diaphragm valves. FITOK’s advance manufacturing processes and stringent quality control ensure the products meet the application needs of ultra high purity gas fluid systems for the semiconductor industry.


  • Minimum particle generation and dead space
  • Cobalt alloy diaphragm with high strength and corrosion resistance to ensure long cycle life
  • No springs or threads in wetted areas improves cleanliness

Technical Data

Port Size1/4″
Port TypeFR Metal Gasket Face seal Fitting
Flow Coefficient (Cv)0.27
Orifice Size0.16 in. (4.1 mm)
Working PressureVacuum to 150 psig (10 bar)
Pneumatic Actuator Operating Pressure60~90 psig (4.2~6.2 bar)
Temperature-10~176℉ (-23~80℃)
Leak Rate (Helium) Internal & External≤ 1×10-9 std cm3/s

In addition to the DE series economic diaphragm valves, other ultra high purity diaphragm valves (DK, DQ, DH, DM, DS, DR, DV, DL, and DF series), ALD series atomic layer deposition diaphragm valves and high purity ball valves (BGP and BRP series) for clean dry air (CDA) and bulk gas are available from FITOK to meet the stringent requirements for fluid system components in industries such as semiconductor.

For any inquires or if any further information is needed on FITOK’s new DE Series Economic Diaphragm Valves please contact our sales team: or call 01942601209.