In semiconductor manufacturing, handling highly toxic and flammable specialty gases like arsine requires absolute system integrity. Before a gas cylinder can be safely replaced, the lines must be thoroughly purged to protect personnel and prevent contamination.

As sub-micron processes advance, traditional piping layouts with multiple weld joints present an unacceptable leak risk. The solution? The FITOK Purge Block.

What is a Purge Block?

A Purge Block integrates the multiple valves and piping required for gas delivery, purging, and exhausting into a single, compact valve body.

By replacing a complex web of individual components with a modular, three-valve diaphragm assembly, it drastically reduces the number of physical connection points and weld joints.

Modular Design & Versatility

The FITOK Purge Block features a highly efficient layout, typically including a process inlet (supporting standard CGA, DIN, or CGA DISS cylinder connections), a process outlet, a purge gas inlet, a waste gas port, and an integrated ultra-high-purity (UHP) sensor port for real-time pressure monitoring.

To cover all specialty gas room architectures, NVFCL supplies the FITOK Purge Block in two pressure ratings:

• Low-Pressure Version: 300 psig

• High-Pressure Version: 4500 psig

Basic Structure & Functions

The FITOK Purge Block features a compact, modular layout engineered with four gas ports and one sensor port for streamlined operation:

• Process Gas Inlet & Outlet: Directs process gas from the cylinder valve through the block and safely into the process pipeline.
• Purge Gas Inlet & Waste Gas Port: Introduces purge media and safely discharges residual waste gases during cylinder changeovers.
• Sensor Port: Accommodates a pressure sensor or gauge for real-time internal pressure monitoring.

Secure Your Gas Delivery Lines with NVFCL

FITOK’s advanced manufacturing allows for complex, integrated flow paths with extremely low leak-rate diaphragm valves. As The Only Authorised FITOK Distributor in the UK & Ireland, NVFCL pairs this world-class UHP technology with local stock, flexible configurations, and rapid delivery times to keep your facility safe and productive.

Are you looking to upgrade your specialty gas cabinets or reduce leak risks in your UHP piping?

Would you like NVFCL to provide a technical drawing or a specification quote for a FITOK Purge Block tailored to your specific cylinder connection requirements?