CSR Series

In atomic layer deposition (ALD) process, selecting the right precursor is critical for process control and film performance, etc. Meanwhile, based on the precursor properties such as volatility and reactivity, matching the right canister will have a synergistic effect on the process. Through high quality control of the material selection to the moulding process, CSR Series Canister Assemblies can accommodate the packaging and storage of most precursors and provide excellent safety and cleanliness for the entire deposition process.


  • Ultra high purity processes for ultra high purity applications
  • Wetted metal parts are 316L stainless steel for broad chemical compatibility
  • External surface mechanical mirror polished and internal surface electropolished to roughness Ra≤10 μin. (0.25 μm)
  • Leak rate (helium): ≤1.0×10 std cm /s
  • Connection Size: 1/4″ to 1/2″
  • Connection type: metal gasket face seal fittings
  • Customised volumes available upon request

Major Materials of Construction

ItemComponentPart Number ExampleMaterial
1Cap6L-CP-FR4316L SS
2Gasket6L-GT-FR4-AS-UP316L SS
3Diaphragm ValveDQ6L-RFR4-RF3316L SS
4Locking DeviceS4-FR4-LD304 SS
5CanisterCSR6L-50-ALD316L SS

If you have any inquires or questions about FITOK Canister Assemblies please contact our sales team:sales@nvfcl.com or call 01942601209.